Abstract
The isotopic composition of the flux of sputtered neutrals was monitored for very low primary beam fluences (\ensuremath{\lesssim}1\ifmmode imes\else exttimes\fi{}${10}^{15}$ ${\mathrm{Ar}}^{+}$ ions/${\mathrm{cm}}^{2}$) and different emission angles (0\ifmmode^\circ\else extdegree\fi{} to 60\ifmmode^\circ\else extdegree\fi{}) by means of secondary neutral mass spectrometry. Initially, the emitted material is enriched in the lighter isotopes by a factor of about 1.05 for $^{70}\mathrm{Ge}$${/}^{76}$Ge and $^{92}\mathrm{Mo}$${/}^{100}$Mo. This initial enrichment is independent of the emission angle and gradually decreases during sample erosion. A steady-state value is reached upon sputter removal of a layer of roughly 15 nm.
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