Authors
Raymond S. Robinson
Topics
Metal and Thin Film MechanicsIon-surface interactions and analysisCopper Interconnects and Reliabilityf NASA CR•NASA CR-159567PHYSICAL.PROCESSESLOAN COPY: RETURN TO . AFWL TECHNICAL LIBRARY KIRTLAND AFB, N. M.IN DIRECTED ION BEAM SPUTTERINGPREPARED FOR1LEWIS RESEARCH CENTER . 'NATIONAL AERONAUTICS AND SPACE ADMINISTRATION.'GRANT 3086 byRaymond S. RobinsonMarch 1979 Department of Physics Colorado State University Fort Collins, CO 80523\TECH LIBRARY KAFB, NM 001,58831. Report No. NASA CR-159567
About
PublishedMar 1, 1979
TypeArticle
Citations2