Publication

Wafer-Scale Demonstration of BEOL-Compatible Ambipolar MoS2 Devices Enabled by Plasma-Enhanced Atomic Layer Deposition

Sep 5, 2025 · 11 authors · 3 topics

Authors

8 of 11

Alberto Martínez‐CuezvaCarlos MárquezFrancisco LorenzoFrancisco GutiérrezManuel Caño‐GarcíaJorge ÁvilaJosé María Gil RoigRuben Ortega

Topics

2D Materials and ApplicationsPerovskite Materials and ApplicationsMXene and MAX Phase Materials

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PublishedSep 5, 2025

TypeArticle

Citations5

References70

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