Publication

Fundamentals of Plasma Immersion Ion Implantation and Deposition

Jan 1, 2000 · 1 author · 4 topics

Authors

Blake P. Wood

Topics

Metal and Thin Film MechanicsPlasma Diagnostics and ApplicationsIon-surface interactions and analysiseScholarship.org Powered by the California Digital Library University of California

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PublishedJan 1, 2000
TypeBook-Chapter
Citations8

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