Legal Opinion
Asyst Technologies, Inc. v. Emtrak, Inc.
Court of Appeals for the Federal Circuit
Decided October 10, 2008No. 2007-1554PublishedCited by 24 opinions
1Opinion of the Court
BRYSON, Circuit Judge.
Asyst Technologies, Inc., is the assignee of U.S. Patent No. 5,097,421 (“the '421 patent”), entitled “Intelligent Wafer Carrier.” The patent claims a system for tracking articles, such as silicon semiconductor wafers, in a manufacturing facility in which the wafers must be processed sequentially at a number of processing stations. The disclosed system includes transportable containers, or “pods,” which contain wafers that are to be transported between different manufacturing stations and allow the wafers to be maintained in a clean environment. The pods contain means for…
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